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Ron Miller
EV Group
DI Erich Thallner Strasse 1
A-4785 St. Florian
Tel.: +43-7712-5311-0
Fax: +43-7712-5311-4600
E-mail: r.miller@evgroup.com
Web: www.EVGroup.com
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Focus: Equipment for all imprint lithography processes - inc. UV-NIL, HE & Micro Cont. Printing
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Gerry Blumenstock
Applied Micro Structures, Inc.
1020 Rincon Circle
San Jose, CA 95131-1325
Tel.: +1 408 907 2885
E-mail: gerryblumenstock@appliedmst.com
Web: www.appliedmst.com
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Focus: Equipment and processes for functional coatings and anti-stiction layers
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Gerhard Liebel
Vice President Sales & Marketing
Semiconductor Equipment
PVA TePla AG
Semiconductor Systems
Hand-Riedl-Strasse 5
85622 Feldkirchen, Germany
Tel.: +49(0)89 905 03-126
Tel.: +49(0)89 905 03-185
E-Mail: gerhard.liebel@pvatepla.com
Web: www.pvatepla.com
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Focus: NIL equipment for stamp cleaning and residual layer removal
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