Equipment


NIL Consortium Equipment: Click on logos to view member's webpages
		NILCom Contact: Ron Miller EV Group Inc. Tel.: +43 602 432 9406 E-mail: r.miller@evgroup.com NILCom Contact: Boris Kobrin Senior Director Marketing and Business Development Applied MicroStructures, Inc 1020 Rincon Circle San Jose, CA 95131-1325 Tel.: +1 408 907 2885-2805 E-mail: boris_kobrin@appliedmst.com Web: http://www.appliedmst.com AMST provides enabling solutions for yield enhancement and COO improvement of Nanoimprint Lithography processes in two ways; first, through application of low surface energy coatings on stamps/molds, and secondly by depositing adhesion improvement coatings on a broad range of substrate materials. Molecular Vapor Deposition (MVD) technology is a breakthrough nanotechnology technique that replaces traditional liquid synthetic approaches; MVD allows for low-temperature vapor deposition of a wide variety of organic and organometallic molecules. The MVD process delivers ultra-thin (typically <20Å), very uniform and conformal films that improve overall NIL performance and extend the lifetime of imprint masters—in a simpler, more reliable, cleaner and cost-effective step. AMST has an installed base of several dozen tools at a mix of advanced manufacturing facilities and research institutions worldwide.